12/4/2011	2:29:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2011	2:29:05 PM	Recipe started at 2:29 PM
12/4/2011	2:29:05 PM	Helium valve closed
12/4/2011	2:29:05 PM	H2 valve closed
12/4/2011	2:29:05 PM	BCl3 valve closed
12/4/2011	2:29:05 PM	PH3 valve closed
12/4/2011	2:29:05 PM	SiCl4 pre valve closed
12/4/2011	2:29:05 PM	SiCl4 post valve closed
12/4/2011	2:29:05 PM	Main Vac valve closed
12/4/2011	2:29:05 PM	Bypass valve closed
12/4/2011	2:29:05 PM	Bubbler valve closed
12/4/2011	2:29:05 PM	Helium MFC set to  0.000000
12/4/2011	2:29:05 PM	H2 MFC set to  0.000000
12/4/2011	2:29:05 PM	BCl3 MFC set to  0.000000
12/4/2011	2:29:05 PM	PHl3 MFC set to  0.000000
12/4/2011	2:29:05 PM	SiCl4 MFC set to  0.000000
12/4/2011	2:29:05 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	2:29:05 PM	Tube furnace set to 0
12/4/2011	2:29:08 PM	H2 valve closed
12/4/2011	2:29:08 PM	BCl3 valve closed
12/4/2011	2:29:08 PM	PH3 valve closed
12/4/2011	2:29:08 PM	SiCl4 pre valve closed
12/4/2011	2:29:08 PM	SiCl4 post valve closed
12/4/2011	2:29:08 PM	Main Vac valve closed
12/4/2011	2:29:08 PM	Bypass valve closed
12/4/2011	2:29:08 PM	Bubbler valve closed
12/4/2011	2:29:08 PM	Helium valve opened
12/4/2011	2:29:08 PM	Helium MFC set to  500.000000
12/4/2011	2:29:08 PM	H2 MFC set to  0.000000
12/4/2011	2:29:08 PM	BCl3 MFC set to  0.000000
12/4/2011	2:29:08 PM	PHl3 MFC set to  0.000000
12/4/2011	2:29:08 PM	SiCl4 MFC set to  0.000000
12/4/2011	2:29:08 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	2:29:09 PM	Tube furnace set to 0
12/4/2011	2:30:13 PM	Helium valve closed
12/4/2011	2:30:13 PM	H2 valve closed
12/4/2011	2:30:13 PM	BCl3 valve closed
12/4/2011	2:30:13 PM	PH3 valve closed
12/4/2011	2:30:13 PM	SiCl4 pre valve closed
12/4/2011	2:30:13 PM	SiCl4 post valve closed
12/4/2011	2:30:13 PM	Main Vac valve closed
12/4/2011	2:30:13 PM	Bypass valve closed
12/4/2011	2:30:13 PM	Bubbler valve closed
12/4/2011	2:30:13 PM	Helium MFC set to  0.000000
12/4/2011	2:30:13 PM	H2 MFC set to  0.000000
12/4/2011	2:30:13 PM	BCl3 MFC set to  0.000000
12/4/2011	2:30:13 PM	PHl3 MFC set to  0.000000
12/4/2011	2:30:13 PM	SiCl4 MFC set to  0.000000
12/4/2011	2:30:13 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	2:30:13 PM	Tube furnace set to 0
12/4/2011	2:30:14 PM	Run finished at 2:30 PM
12/4/2011	2:30:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2011	2:39:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2011	2:39:50 PM	Recipe started at 2:39 PM
12/4/2011	2:39:50 PM	Helium valve closed
12/4/2011	2:39:50 PM	H2 valve closed
12/4/2011	2:39:50 PM	BCl3 valve closed
12/4/2011	2:39:50 PM	PH3 valve closed
12/4/2011	2:39:50 PM	SiCl4 pre valve closed
12/4/2011	2:39:50 PM	SiCl4 post valve closed
12/4/2011	2:39:50 PM	Main Vac valve closed
12/4/2011	2:39:50 PM	Bubbler valve closed
12/4/2011	2:39:50 PM	Bypass valve opened
12/4/2011	2:39:50 PM	Helium MFC set to  0.000000
12/4/2011	2:39:50 PM	H2 MFC set to  0.000000
12/4/2011	2:39:50 PM	BCl3 MFC set to  0.000000
12/4/2011	2:39:50 PM	PHl3 MFC set to  0.000000
12/4/2011	2:39:50 PM	SiCl4 MFC set to  0.000000
12/4/2011	2:39:50 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	2:39:50 PM	Tube furnace set to 0
12/4/2011	2:42:15 PM	Helium valve closed
12/4/2011	2:42:15 PM	H2 valve closed
12/4/2011	2:42:15 PM	BCl3 valve closed
12/4/2011	2:42:15 PM	PH3 valve closed
12/4/2011	2:42:15 PM	SiCl4 pre valve closed
12/4/2011	2:42:15 PM	SiCl4 post valve closed
12/4/2011	2:42:15 PM	Main Vac valve closed
12/4/2011	2:42:15 PM	Bubbler valve closed
12/4/2011	2:42:15 PM	Bypass valve opened
12/4/2011	2:42:15 PM	Helium MFC set to  0.000000
12/4/2011	2:42:15 PM	H2 MFC set to  0.000000
12/4/2011	2:42:15 PM	BCl3 MFC set to  0.000000
12/4/2011	2:42:15 PM	PHl3 MFC set to  0.000000
12/4/2011	2:42:15 PM	SiCl4 MFC set to  0.000000
12/4/2011	2:42:15 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	2:42:15 PM	Tube furnace set to 0
12/4/2011	2:43:15 PM	Helium valve closed
12/4/2011	2:43:15 PM	H2 valve closed
12/4/2011	2:43:15 PM	BCl3 valve closed
12/4/2011	2:43:15 PM	PH3 valve closed
12/4/2011	2:43:15 PM	SiCl4 pre valve closed
12/4/2011	2:43:15 PM	SiCl4 post valve closed
12/4/2011	2:43:15 PM	Bypass valve closed
12/4/2011	2:43:15 PM	Bubbler valve closed
12/4/2011	2:43:15 PM	Main Vac valve opened
12/4/2011	2:43:15 PM	Helium MFC set to  0.000000
12/4/2011	2:43:15 PM	H2 MFC set to  0.000000
12/4/2011	2:43:15 PM	BCl3 MFC set to  0.000000
12/4/2011	2:43:15 PM	PHl3 MFC set to  0.000000
12/4/2011	2:43:15 PM	SiCl4 MFC set to  0.000000
12/4/2011	2:43:15 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	2:43:15 PM	Tube furnace set to 0
12/4/2011	2:43:16 PM	Run finished at 2:43 PM
12/4/2011	2:43:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2011	3:43:14 PM	Main Vac valve closed
12/4/2011	3:43:38 PM	Main Vac valve opened
12/4/2011	3:44:26 PM	Recipe started at 3:44 PM
12/4/2011	3:44:26 PM	Helium valve closed
12/4/2011	3:44:26 PM	H2 valve closed
12/4/2011	3:44:26 PM	BCl3 valve closed
12/4/2011	3:44:26 PM	PH3 valve closed
12/4/2011	3:44:26 PM	SiCl4 pre valve closed
12/4/2011	3:44:26 PM	SiCl4 post valve closed
12/4/2011	3:44:26 PM	Bypass valve closed
12/4/2011	3:44:26 PM	Bubbler valve closed
12/4/2011	3:44:26 PM	Main Vac valve opened
12/4/2011	3:44:26 PM	Helium MFC set to  0.000000
12/4/2011	3:44:26 PM	H2 MFC set to  0.000000
12/4/2011	3:44:26 PM	BCl3 MFC set to  0.000000
12/4/2011	3:44:26 PM	PHl3 MFC set to  0.000000
12/4/2011	3:44:26 PM	SiCl4 MFC set to  0.000000
12/4/2011	3:44:26 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	3:44:26 PM	Tube furnace set to 0
12/4/2011	3:44:36 PM	Helium valve closed
12/4/2011	3:44:36 PM	H2 valve closed
12/4/2011	3:44:36 PM	BCl3 valve closed
12/4/2011	3:44:36 PM	PH3 valve closed
12/4/2011	3:44:36 PM	SiCl4 pre valve closed
12/4/2011	3:44:36 PM	SiCl4 post valve closed
12/4/2011	3:44:36 PM	Main Vac valve closed
12/4/2011	3:44:36 PM	Bypass valve closed
12/4/2011	3:44:36 PM	Bubbler valve closed
12/4/2011	3:44:36 PM	Helium MFC set to  0.000000
12/4/2011	3:44:36 PM	H2 MFC set to  0.000000
12/4/2011	3:44:36 PM	BCl3 MFC set to  0.000000
12/4/2011	3:44:36 PM	PHl3 MFC set to  0.000000
12/4/2011	3:44:36 PM	SiCl4 MFC set to  0.000000
12/4/2011	3:44:36 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	3:44:36 PM	Tube furnace set to 0
12/4/2011	3:44:39 PM	Helium valve closed
12/4/2011	3:44:39 PM	BCl3 valve closed
12/4/2011	3:44:39 PM	PH3 valve closed
12/4/2011	3:44:39 PM	SiCl4 pre valve closed
12/4/2011	3:44:39 PM	SiCl4 post valve closed
12/4/2011	3:44:39 PM	Main Vac valve closed
12/4/2011	3:44:39 PM	Bypass valve closed
12/4/2011	3:44:39 PM	Bubbler valve closed
12/4/2011	3:44:39 PM	H2 valve opened
12/4/2011	3:44:39 PM	Helium MFC set to  0.000000
12/4/2011	3:44:39 PM	H2 MFC set to  500.000000
12/4/2011	3:44:39 PM	BCl3 MFC set to  0.000000
12/4/2011	3:44:39 PM	PHl3 MFC set to  0.000000
12/4/2011	3:44:39 PM	SiCl4 MFC set to  0.000000
12/4/2011	3:44:39 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	3:44:40 PM	Tube furnace set to 0
12/4/2011	3:45:48 PM	Helium valve closed
12/4/2011	3:45:48 PM	BCl3 valve closed
12/4/2011	3:45:48 PM	PH3 valve closed
12/4/2011	3:45:48 PM	SiCl4 pre valve closed
12/4/2011	3:45:48 PM	SiCl4 post valve closed
12/4/2011	3:45:48 PM	Main Vac valve closed
12/4/2011	3:45:48 PM	Bypass valve closed
12/4/2011	3:45:48 PM	H2 valve opened
12/4/2011	3:45:48 PM	Bubbler valve opened
12/4/2011	3:45:48 PM	Helium MFC set to  0.000000
12/4/2011	3:45:48 PM	H2 MFC set to  500.000000
12/4/2011	3:45:48 PM	BCl3 MFC set to  0.000000
12/4/2011	3:45:48 PM	PHl3 MFC set to  0.000000
12/4/2011	3:45:48 PM	SiCl4 MFC set to  0.000000
12/4/2011	3:45:48 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	3:45:48 PM	Tube furnace set to 0
12/4/2011	3:45:49 PM	Helium valve closed
12/4/2011	3:45:49 PM	BCl3 valve closed
12/4/2011	3:45:49 PM	PH3 valve closed
12/4/2011	3:45:49 PM	SiCl4 pre valve closed
12/4/2011	3:45:49 PM	SiCl4 post valve closed
12/4/2011	3:45:49 PM	Main Vac valve closed
12/4/2011	3:45:49 PM	Bypass valve closed
12/4/2011	3:45:49 PM	H2 valve opened
12/4/2011	3:45:49 PM	Bubbler valve opened
12/4/2011	3:45:49 PM	Helium MFC set to  0.000000
12/4/2011	3:45:49 PM	H2 MFC set to  500.000000
12/4/2011	3:45:49 PM	BCl3 MFC set to  0.000000
12/4/2011	3:45:49 PM	PHl3 MFC set to  0.000000
12/4/2011	3:45:49 PM	SiCl4 MFC set to  0.000000
12/4/2011	3:45:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	3:45:49 PM	Tube furnace set to 1000
12/4/2011	4:10:49 PM	Helium valve closed
12/4/2011	4:10:49 PM	PH3 valve closed
12/4/2011	4:10:49 PM	Main Vac valve closed
12/4/2011	4:10:49 PM	Bypass valve closed
12/4/2011	4:10:49 PM	H2 valve opened
12/4/2011	4:10:49 PM	BCl3 valve opened
12/4/2011	4:10:49 PM	SiCl4 pre valve opened
12/4/2011	4:10:49 PM	SiCl4 post valve opened
12/4/2011	4:10:49 PM	Bubbler valve opened
12/4/2011	4:10:49 PM	Helium MFC set to  0.000000
12/4/2011	4:10:49 PM	H2 MFC set to  450.000000
12/4/2011	4:10:49 PM	BCl3 MFC set to  1.500000
12/4/2011	4:10:49 PM	PHl3 MFC set to  0.000000
12/4/2011	4:10:49 PM	SiCl4 MFC set to  50.000000
12/4/2011	4:10:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	4:10:49 PM	Tube furnace set to 1000
12/4/2011	4:55:49 PM	Helium valve closed
12/4/2011	4:55:49 PM	BCl3 valve closed
12/4/2011	4:55:49 PM	PH3 valve closed
12/4/2011	4:55:49 PM	SiCl4 pre valve closed
12/4/2011	4:55:49 PM	SiCl4 post valve closed
12/4/2011	4:55:49 PM	Main Vac valve closed
12/4/2011	4:55:49 PM	Bypass valve closed
12/4/2011	4:55:49 PM	H2 valve opened
12/4/2011	4:55:49 PM	Bubbler valve opened
12/4/2011	4:55:49 PM	Helium MFC set to  0.000000
12/4/2011	4:55:49 PM	H2 MFC set to  500.000000
12/4/2011	4:55:49 PM	BCl3 MFC set to  0.000000
12/4/2011	4:55:49 PM	PHl3 MFC set to  0.000000
12/4/2011	4:55:49 PM	SiCl4 MFC set to  0.000000
12/4/2011	4:55:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	4:55:49 PM	Tube furnace set to 750
12/4/2011	5:10:49 PM	H2 valve closed
12/4/2011	5:10:49 PM	BCl3 valve closed
12/4/2011	5:10:49 PM	PH3 valve closed
12/4/2011	5:10:49 PM	SiCl4 pre valve closed
12/4/2011	5:10:49 PM	SiCl4 post valve closed
12/4/2011	5:10:49 PM	Main Vac valve closed
12/4/2011	5:10:49 PM	Bypass valve closed
12/4/2011	5:10:49 PM	Helium valve opened
12/4/2011	5:10:49 PM	Bubbler valve opened
12/4/2011	5:10:49 PM	Helium MFC set to  500.000000
12/4/2011	5:10:49 PM	H2 MFC set to  0.000000
12/4/2011	5:10:49 PM	BCl3 MFC set to  0.000000
12/4/2011	5:10:49 PM	PHl3 MFC set to  0.000000
12/4/2011	5:10:49 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:10:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:10:50 PM	Tube furnace set to 0
12/4/2011	5:30:50 PM	Helium valve closed
12/4/2011	5:30:50 PM	H2 valve closed
12/4/2011	5:30:50 PM	BCl3 valve closed
12/4/2011	5:30:50 PM	PH3 valve closed
12/4/2011	5:30:50 PM	SiCl4 pre valve closed
12/4/2011	5:30:50 PM	SiCl4 post valve closed
12/4/2011	5:30:50 PM	Main Vac valve closed
12/4/2011	5:30:50 PM	Bypass valve closed
12/4/2011	5:30:50 PM	Bubbler valve closed
12/4/2011	5:30:50 PM	Helium MFC set to  0.000000
12/4/2011	5:30:50 PM	H2 MFC set to  0.000000
12/4/2011	5:30:50 PM	BCl3 MFC set to  0.000000
12/4/2011	5:30:50 PM	PHl3 MFC set to  0.000000
12/4/2011	5:30:50 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:30:50 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:30:50 PM	Tube furnace set to 0
12/4/2011	5:50:50 PM	Helium valve closed
12/4/2011	5:50:50 PM	H2 valve closed
12/4/2011	5:50:50 PM	BCl3 valve closed
12/4/2011	5:50:50 PM	PH3 valve closed
12/4/2011	5:50:50 PM	SiCl4 pre valve closed
12/4/2011	5:50:50 PM	SiCl4 post valve closed
12/4/2011	5:50:50 PM	Main Vac valve closed
12/4/2011	5:50:50 PM	Bubbler valve closed
12/4/2011	5:50:50 PM	Bypass valve opened
12/4/2011	5:50:50 PM	Helium MFC set to  0.000000
12/4/2011	5:50:50 PM	H2 MFC set to  0.000000
12/4/2011	5:50:50 PM	BCl3 MFC set to  0.000000
12/4/2011	5:50:50 PM	PHl3 MFC set to  0.000000
12/4/2011	5:50:50 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:50:50 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:50:50 PM	Tube furnace set to 0
12/4/2011	5:53:11 PM	Helium valve closed
12/4/2011	5:53:11 PM	H2 valve closed
12/4/2011	5:53:11 PM	BCl3 valve closed
12/4/2011	5:53:11 PM	PH3 valve closed
12/4/2011	5:53:11 PM	SiCl4 pre valve closed
12/4/2011	5:53:11 PM	SiCl4 post valve closed
12/4/2011	5:53:11 PM	Main Vac valve closed
12/4/2011	5:53:11 PM	Bubbler valve closed
12/4/2011	5:53:11 PM	Bypass valve opened
12/4/2011	5:53:11 PM	Helium MFC set to  0.000000
12/4/2011	5:53:11 PM	H2 MFC set to  0.000000
12/4/2011	5:53:11 PM	BCl3 MFC set to  0.000000
12/4/2011	5:53:11 PM	PHl3 MFC set to  0.000000
12/4/2011	5:53:11 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:53:11 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:53:11 PM	Tube furnace set to 0
12/4/2011	5:53:30 PM	Run aborted at 5:53 PM
12/4/2011	5:53:30 PM	Helium valve closed
12/4/2011	5:53:30 PM	H2 valve closed
12/4/2011	5:53:30 PM	BCl3 valve closed
12/4/2011	5:53:30 PM	PH3 valve closed
12/4/2011	5:53:30 PM	SiCl4 pre valve closed
12/4/2011	5:53:30 PM	SiCl4 post valve closed
12/4/2011	5:53:30 PM	Bypass valve closed
12/4/2011	5:53:30 PM	Main Vac valve closed
12/4/2011	5:53:30 PM	Bubbler valve closed
12/4/2011	5:53:30 PM	Helium MFC set to  0.000000
12/4/2011	5:53:30 PM	H2 MFC set to  0.000000
12/4/2011	5:53:30 PM	BCl3 MFC set to  0.000000
12/4/2011	5:53:30 PM	PHl3 MFC set to  0.000000
12/4/2011	5:53:30 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:53:30 PM	Tube furnace set to 0
12/4/2011	5:53:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2011	5:53:33 PM	Recipe started at 5:53 PM
12/4/2011	5:53:33 PM	Helium valve closed
12/4/2011	5:53:33 PM	H2 valve closed
12/4/2011	5:53:33 PM	BCl3 valve closed
12/4/2011	5:53:33 PM	PH3 valve closed
12/4/2011	5:53:33 PM	SiCl4 pre valve closed
12/4/2011	5:53:33 PM	SiCl4 post valve closed
12/4/2011	5:53:33 PM	Main Vac valve closed
12/4/2011	5:53:33 PM	Bypass valve closed
12/4/2011	5:53:33 PM	Bubbler valve closed
12/4/2011	5:53:33 PM	Helium MFC set to  0.000000
12/4/2011	5:53:33 PM	H2 MFC set to  0.000000
12/4/2011	5:53:33 PM	BCl3 MFC set to  0.000000
12/4/2011	5:53:33 PM	PHl3 MFC set to  0.000000
12/4/2011	5:53:33 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:53:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:53:33 PM	Tube furnace set to 0
12/4/2011	5:53:36 PM	H2 valve closed
12/4/2011	5:53:36 PM	BCl3 valve closed
12/4/2011	5:53:36 PM	PH3 valve closed
12/4/2011	5:53:36 PM	SiCl4 pre valve closed
12/4/2011	5:53:36 PM	SiCl4 post valve closed
12/4/2011	5:53:36 PM	Main Vac valve closed
12/4/2011	5:53:36 PM	Bypass valve closed
12/4/2011	5:53:36 PM	Bubbler valve closed
12/4/2011	5:53:36 PM	Helium valve opened
12/4/2011	5:53:36 PM	Helium MFC set to  500.000000
12/4/2011	5:53:36 PM	H2 MFC set to  0.000000
12/4/2011	5:53:36 PM	BCl3 MFC set to  0.000000
12/4/2011	5:53:36 PM	PHl3 MFC set to  0.000000
12/4/2011	5:53:36 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:53:36 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:53:36 PM	Tube furnace set to 0
12/4/2011	5:54:02 PM	Helium valve closed
12/4/2011	5:54:02 PM	H2 valve closed
12/4/2011	5:54:02 PM	BCl3 valve closed
12/4/2011	5:54:02 PM	PH3 valve closed
12/4/2011	5:54:02 PM	SiCl4 pre valve closed
12/4/2011	5:54:02 PM	SiCl4 post valve closed
12/4/2011	5:54:02 PM	Main Vac valve closed
12/4/2011	5:54:02 PM	Bypass valve closed
12/4/2011	5:54:02 PM	Bubbler valve closed
12/4/2011	5:54:02 PM	Helium MFC set to  0.000000
12/4/2011	5:54:02 PM	H2 MFC set to  0.000000
12/4/2011	5:54:02 PM	BCl3 MFC set to  0.000000
12/4/2011	5:54:02 PM	PHl3 MFC set to  0.000000
12/4/2011	5:54:02 PM	SiCl4 MFC set to  0.000000
12/4/2011	5:54:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	5:54:02 PM	Tube furnace set to 0
12/4/2011	5:54:03 PM	Run finished at 5:54 PM
12/4/2011	5:54:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2011	5:54:38 PM	Helium MFC set to  500.000000
12/4/2011	5:54:39 PM	Helium valve opened
12/4/2011	6:00:30 PM	Helium valve closed
12/4/2011	6:00:30 PM	H2 valve closed
12/4/2011	6:00:30 PM	BCl3 valve closed
12/4/2011	6:00:30 PM	PH3 valve closed
12/4/2011	6:00:30 PM	SiCl4 pre valve closed
12/4/2011	6:00:30 PM	SiCl4 post valve closed
12/4/2011	6:00:30 PM	Main Vac valve closed
12/4/2011	6:00:30 PM	Bubbler valve closed
12/4/2011	6:00:30 PM	Bypass valve closed
12/4/2011	6:00:30 PM	Helium MFC set to  0.000000
12/4/2011	6:00:30 PM	H2 MFC set to  0.000000
12/4/2011	6:00:30 PM	BCl3 MFC set to  0.000000
12/4/2011	6:00:30 PM	PHl3 MFC set to  0.000000
12/4/2011	6:00:30 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:00:30 PM	Bypass solenoid MFC set to  760.000000
12/4/2011	6:00:31 PM	Tube furnace set to 0
12/4/2011	6:00:31 PM	Baratron reads 904.650805 Torr.  Emergency exit.
12/4/2011	6:00:36 PM	Program exited cleanly
12/4/2011	6:00:59 PM	Helium valve closed
12/4/2011	6:00:59 PM	H2 valve closed
12/4/2011	6:00:59 PM	BCl3 valve closed
12/4/2011	6:00:59 PM	PH3 valve closed
12/4/2011	6:00:59 PM	SiCl4 pre valve closed
12/4/2011	6:00:59 PM	SiCl4 post valve closed
12/4/2011	6:00:59 PM	Main Vac valve closed
12/4/2011	6:00:59 PM	Bypass valve closed
12/4/2011	6:00:59 PM	Bubbler valve closed
12/4/2011	6:00:59 PM	Helium MFC set to  0.000000
12/4/2011	6:00:59 PM	H2 MFC set to  0.000000
12/4/2011	6:00:59 PM	BCl3 MFC set to  0.000000
12/4/2011	6:00:59 PM	PHl3 MFC set to  0.000000
12/4/2011	6:00:59 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:00:59 PM	Bypass solenoid MFC set to  760.000000
12/4/2011	6:00:59 PM	Tube furnace set to 0
12/4/2011	6:01:00 PM	Helium valve closed
12/4/2011	6:01:00 PM	H2 valve closed
12/4/2011	6:01:00 PM	BCl3 valve closed
12/4/2011	6:01:00 PM	PH3 valve closed
12/4/2011	6:01:00 PM	SiCl4 pre valve closed
12/4/2011	6:01:00 PM	SiCl4 post valve closed
12/4/2011	6:01:00 PM	Main Vac valve closed
12/4/2011	6:01:00 PM	Bubbler valve closed
12/4/2011	6:01:00 PM	Bypass valve closed
12/4/2011	6:01:00 PM	Helium MFC set to  0.000000
12/4/2011	6:01:00 PM	H2 MFC set to  0.000000
12/4/2011	6:01:00 PM	BCl3 MFC set to  0.000000
12/4/2011	6:01:00 PM	PHl3 MFC set to  0.000000
12/4/2011	6:01:00 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:01:00 PM	Bypass solenoid MFC set to  760.000000
12/4/2011	6:01:00 PM	Tube furnace set to 0
12/4/2011	6:01:00 PM	Baratron reads 909.754945 Torr.  Emergency exit.
12/4/2011	6:01:01 PM	Program exited cleanly
12/4/2011	6:01:21 PM	Helium valve closed
12/4/2011	6:01:21 PM	H2 valve closed
12/4/2011	6:01:21 PM	BCl3 valve closed
12/4/2011	6:01:21 PM	PH3 valve closed
12/4/2011	6:01:21 PM	SiCl4 pre valve closed
12/4/2011	6:01:21 PM	SiCl4 post valve closed
12/4/2011	6:01:21 PM	Main Vac valve closed
12/4/2011	6:01:21 PM	Bypass valve closed
12/4/2011	6:01:21 PM	Bubbler valve closed
12/4/2011	6:01:21 PM	Helium MFC set to  0.000000
12/4/2011	6:01:21 PM	H2 MFC set to  0.000000
12/4/2011	6:01:21 PM	BCl3 MFC set to  0.000000
12/4/2011	6:01:21 PM	PHl3 MFC set to  0.000000
12/4/2011	6:01:21 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:01:21 PM	Bypass solenoid MFC set to  760.000000
12/4/2011	6:01:22 PM	Tube furnace set to 0
12/4/2011	6:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2011	6:01:54 PM	Recipe started at 6:01 PM
12/4/2011	6:01:54 PM	Helium valve closed
12/4/2011	6:01:54 PM	H2 valve closed
12/4/2011	6:01:54 PM	BCl3 valve closed
12/4/2011	6:01:54 PM	PH3 valve closed
12/4/2011	6:01:54 PM	SiCl4 pre valve closed
12/4/2011	6:01:54 PM	SiCl4 post valve closed
12/4/2011	6:01:54 PM	Main Vac valve closed
12/4/2011	6:01:54 PM	Bubbler valve closed
12/4/2011	6:01:54 PM	Bypass valve opened
12/4/2011	6:01:54 PM	Helium MFC set to  0.000000
12/4/2011	6:01:54 PM	H2 MFC set to  0.000000
12/4/2011	6:01:54 PM	BCl3 MFC set to  0.000000
12/4/2011	6:01:54 PM	PHl3 MFC set to  0.000000
12/4/2011	6:01:54 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:01:54 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	6:01:54 PM	Tube furnace set to 0
12/4/2011	6:03:51 PM	Helium valve closed
12/4/2011	6:03:51 PM	H2 valve closed
12/4/2011	6:03:51 PM	BCl3 valve closed
12/4/2011	6:03:51 PM	PH3 valve closed
12/4/2011	6:03:51 PM	SiCl4 pre valve closed
12/4/2011	6:03:51 PM	SiCl4 post valve closed
12/4/2011	6:03:51 PM	Main Vac valve closed
12/4/2011	6:03:51 PM	Bubbler valve closed
12/4/2011	6:03:51 PM	Bypass valve opened
12/4/2011	6:03:51 PM	Helium MFC set to  0.000000
12/4/2011	6:03:51 PM	H2 MFC set to  0.000000
12/4/2011	6:03:51 PM	BCl3 MFC set to  0.000000
12/4/2011	6:03:51 PM	PHl3 MFC set to  0.000000
12/4/2011	6:03:51 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:03:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	6:03:51 PM	Tube furnace set to 0
12/4/2011	6:04:51 PM	Helium valve closed
12/4/2011	6:04:51 PM	H2 valve closed
12/4/2011	6:04:51 PM	BCl3 valve closed
12/4/2011	6:04:51 PM	PH3 valve closed
12/4/2011	6:04:51 PM	SiCl4 pre valve closed
12/4/2011	6:04:51 PM	SiCl4 post valve closed
12/4/2011	6:04:51 PM	Bypass valve closed
12/4/2011	6:04:51 PM	Bubbler valve closed
12/4/2011	6:04:51 PM	Main Vac valve opened
12/4/2011	6:04:51 PM	Helium MFC set to  0.000000
12/4/2011	6:04:51 PM	H2 MFC set to  0.000000
12/4/2011	6:04:51 PM	BCl3 MFC set to  0.000000
12/4/2011	6:04:51 PM	PHl3 MFC set to  0.000000
12/4/2011	6:04:51 PM	SiCl4 MFC set to  0.000000
12/4/2011	6:04:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	6:04:51 PM	Tube furnace set to 0
12/4/2011	6:04:52 PM	Run finished at 6:04 PM
12/4/2011	6:04:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2011	7:15:18 PM	Main Vac valve closed
12/4/2011	7:15:34 PM	Main Vac valve opened
12/4/2011	7:19:46 PM	Main Vac valve closed
12/4/2011	7:19:56 PM	Main Vac valve opened
12/4/2011	7:55:19 PM	Main Vac valve closed
12/4/2011	7:55:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2011	7:55:42 PM	Recipe started at 7:55 PM
12/4/2011	7:55:42 PM	Helium valve closed
12/4/2011	7:55:42 PM	H2 valve closed
12/4/2011	7:55:42 PM	BCl3 valve closed
12/4/2011	7:55:42 PM	PH3 valve closed
12/4/2011	7:55:42 PM	SiCl4 pre valve closed
12/4/2011	7:55:42 PM	SiCl4 post valve closed
12/4/2011	7:55:42 PM	Main Vac valve closed
12/4/2011	7:55:43 PM	Bubbler valve closed
12/4/2011	7:55:43 PM	Bypass valve opened
12/4/2011	7:55:43 PM	Helium MFC set to  0.000000
12/4/2011	7:55:43 PM	H2 MFC set to  0.000000
12/4/2011	7:55:43 PM	BCl3 MFC set to  0.000000
12/4/2011	7:55:43 PM	PHl3 MFC set to  0.000000
12/4/2011	7:55:43 PM	SiCl4 MFC set to  0.000000
12/4/2011	7:55:43 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	7:55:43 PM	Tube furnace set to 0
12/4/2011	7:55:44 PM	Helium valve closed
12/4/2011	7:55:44 PM	H2 valve closed
12/4/2011	7:55:44 PM	BCl3 valve closed
12/4/2011	7:55:44 PM	PH3 valve closed
12/4/2011	7:55:44 PM	SiCl4 pre valve closed
12/4/2011	7:55:44 PM	SiCl4 post valve closed
12/4/2011	7:55:44 PM	Main Vac valve closed
12/4/2011	7:55:44 PM	Bubbler valve closed
12/4/2011	7:55:44 PM	Bypass valve opened
12/4/2011	7:55:44 PM	Helium MFC set to  0.000000
12/4/2011	7:55:44 PM	H2 MFC set to  0.000000
12/4/2011	7:55:44 PM	BCl3 MFC set to  0.000000
12/4/2011	7:55:44 PM	PHl3 MFC set to  0.000000
12/4/2011	7:55:44 PM	SiCl4 MFC set to  0.000000
12/4/2011	7:55:44 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	7:55:44 PM	Tube furnace set to 0
12/4/2011	7:55:48 PM	Helium valve closed
12/4/2011	7:55:48 PM	H2 valve closed
12/4/2011	7:55:48 PM	BCl3 valve closed
12/4/2011	7:55:48 PM	PH3 valve closed
12/4/2011	7:55:48 PM	SiCl4 pre valve closed
12/4/2011	7:55:48 PM	SiCl4 post valve closed
12/4/2011	7:55:48 PM	Bypass valve closed
12/4/2011	7:55:48 PM	Bubbler valve closed
12/4/2011	7:55:48 PM	Main Vac valve opened
12/4/2011	7:55:48 PM	Helium MFC set to  0.000000
12/4/2011	7:55:48 PM	H2 MFC set to  0.000000
12/4/2011	7:55:48 PM	BCl3 MFC set to  0.000000
12/4/2011	7:55:48 PM	PHl3 MFC set to  0.000000
12/4/2011	7:55:48 PM	SiCl4 MFC set to  0.000000
12/4/2011	7:55:48 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	7:55:49 PM	Tube furnace set to 0
12/4/2011	7:55:49 PM	Run aborted at 7:55 PM
12/4/2011	7:55:49 PM	Helium valve closed
12/4/2011	7:55:49 PM	H2 valve closed
12/4/2011	7:55:49 PM	BCl3 valve closed
12/4/2011	7:55:49 PM	PH3 valve closed
12/4/2011	7:55:49 PM	SiCl4 pre valve closed
12/4/2011	7:55:49 PM	SiCl4 post valve closed
12/4/2011	7:55:49 PM	Bypass valve closed
12/4/2011	7:55:49 PM	Main Vac valve closed
12/4/2011	7:55:49 PM	Bubbler valve closed
12/4/2011	7:55:49 PM	Helium MFC set to  0.000000
12/4/2011	7:55:49 PM	H2 MFC set to  0.000000
12/4/2011	7:55:49 PM	BCl3 MFC set to  0.000000
12/4/2011	7:55:49 PM	PHl3 MFC set to  0.000000
12/4/2011	7:55:49 PM	SiCl4 MFC set to  0.000000
12/4/2011	7:55:49 PM	Tube furnace set to 0
12/4/2011	7:55:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2011	7:55:55 PM	Main Vac valve opened
12/4/2011	7:56:51 PM	Main Vac valve closed
12/4/2011	7:57:04 PM	Main Vac valve opened
12/4/2011	7:59:21 PM	Recipe started at 7:59 PM
12/4/2011	7:59:21 PM	Helium valve closed
12/4/2011	7:59:21 PM	H2 valve closed
12/4/2011	7:59:21 PM	BCl3 valve closed
12/4/2011	7:59:21 PM	PH3 valve closed
12/4/2011	7:59:21 PM	SiCl4 pre valve closed
12/4/2011	7:59:21 PM	SiCl4 post valve closed
12/4/2011	7:59:21 PM	Main Vac valve closed
12/4/2011	7:59:21 PM	Bypass valve closed
12/4/2011	7:59:21 PM	Bubbler valve closed
12/4/2011	7:59:21 PM	Helium MFC set to  0.000000
12/4/2011	7:59:21 PM	H2 MFC set to  0.000000
12/4/2011	7:59:21 PM	BCl3 MFC set to  0.000000
12/4/2011	7:59:21 PM	PHl3 MFC set to  0.000000
12/4/2011	7:59:21 PM	SiCl4 MFC set to  0.000000
12/4/2011	7:59:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	7:59:22 PM	Tube furnace set to 0
12/4/2011	7:59:25 PM	Helium valve closed
12/4/2011	7:59:25 PM	BCl3 valve closed
12/4/2011	7:59:25 PM	PH3 valve closed
12/4/2011	7:59:25 PM	SiCl4 pre valve closed
12/4/2011	7:59:25 PM	SiCl4 post valve closed
12/4/2011	7:59:25 PM	Main Vac valve closed
12/4/2011	7:59:25 PM	Bypass valve closed
12/4/2011	7:59:25 PM	Bubbler valve closed
12/4/2011	7:59:25 PM	H2 valve opened
12/4/2011	7:59:25 PM	Helium MFC set to  0.000000
12/4/2011	7:59:25 PM	H2 MFC set to  500.000000
12/4/2011	7:59:25 PM	BCl3 MFC set to  0.000000
12/4/2011	7:59:25 PM	PHl3 MFC set to  0.000000
12/4/2011	7:59:25 PM	SiCl4 MFC set to  0.000000
12/4/2011	7:59:25 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	7:59:25 PM	Tube furnace set to 0
12/4/2011	8:00:31 PM	Helium valve closed
12/4/2011	8:00:31 PM	BCl3 valve closed
12/4/2011	8:00:31 PM	PH3 valve closed
12/4/2011	8:00:31 PM	SiCl4 pre valve closed
12/4/2011	8:00:31 PM	SiCl4 post valve closed
12/4/2011	8:00:31 PM	Main Vac valve closed
12/4/2011	8:00:31 PM	Bypass valve closed
12/4/2011	8:00:31 PM	H2 valve opened
12/4/2011	8:00:31 PM	Bubbler valve opened
12/4/2011	8:00:31 PM	Helium MFC set to  0.000000
12/4/2011	8:00:31 PM	H2 MFC set to  500.000000
12/4/2011	8:00:31 PM	BCl3 MFC set to  0.000000
12/4/2011	8:00:31 PM	PHl3 MFC set to  0.000000
12/4/2011	8:00:31 PM	SiCl4 MFC set to  0.000000
12/4/2011	8:00:31 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	8:00:31 PM	Tube furnace set to 0
12/4/2011	8:00:32 PM	Helium valve closed
12/4/2011	8:00:32 PM	BCl3 valve closed
12/4/2011	8:00:32 PM	PH3 valve closed
12/4/2011	8:00:32 PM	SiCl4 pre valve closed
12/4/2011	8:00:32 PM	SiCl4 post valve closed
12/4/2011	8:00:32 PM	Main Vac valve closed
12/4/2011	8:00:32 PM	Bypass valve closed
12/4/2011	8:00:32 PM	H2 valve opened
12/4/2011	8:00:32 PM	Bubbler valve opened
12/4/2011	8:00:32 PM	Helium MFC set to  0.000000
12/4/2011	8:00:32 PM	H2 MFC set to  500.000000
12/4/2011	8:00:32 PM	BCl3 MFC set to  0.000000
12/4/2011	8:00:32 PM	PHl3 MFC set to  0.000000
12/4/2011	8:00:32 PM	SiCl4 MFC set to  0.000000
12/4/2011	8:00:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	8:00:32 PM	Tube furnace set to 1000
12/4/2011	8:25:32 PM	Helium valve closed
12/4/2011	8:25:32 PM	PH3 valve closed
12/4/2011	8:25:32 PM	Main Vac valve closed
12/4/2011	8:25:32 PM	Bypass valve closed
12/4/2011	8:25:32 PM	H2 valve opened
12/4/2011	8:25:32 PM	BCl3 valve opened
12/4/2011	8:25:32 PM	SiCl4 pre valve opened
12/4/2011	8:25:32 PM	SiCl4 post valve opened
12/4/2011	8:25:32 PM	Bubbler valve opened
12/4/2011	8:25:32 PM	Helium MFC set to  0.000000
12/4/2011	8:25:32 PM	H2 MFC set to  450.000000
12/4/2011	8:25:32 PM	BCl3 MFC set to  1.500000
12/4/2011	8:25:32 PM	PHl3 MFC set to  0.000000
12/4/2011	8:25:32 PM	SiCl4 MFC set to  50.000000
12/4/2011	8:25:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	8:25:33 PM	Tube furnace set to 1000
12/4/2011	9:15:33 PM	Helium valve closed
12/4/2011	9:15:33 PM	BCl3 valve closed
12/4/2011	9:15:33 PM	PH3 valve closed
12/4/2011	9:15:33 PM	SiCl4 pre valve closed
12/4/2011	9:15:33 PM	SiCl4 post valve closed
12/4/2011	9:15:33 PM	Main Vac valve closed
12/4/2011	9:15:33 PM	Bypass valve closed
12/4/2011	9:15:33 PM	H2 valve opened
12/4/2011	9:15:33 PM	Bubbler valve opened
12/4/2011	9:15:33 PM	Helium MFC set to  0.000000
12/4/2011	9:15:33 PM	H2 MFC set to  500.000000
12/4/2011	9:15:33 PM	BCl3 MFC set to  0.000000
12/4/2011	9:15:33 PM	PHl3 MFC set to  0.000000
12/4/2011	9:15:33 PM	SiCl4 MFC set to  0.000000
12/4/2011	9:15:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	9:15:33 PM	Tube furnace set to 750
12/4/2011	9:30:33 PM	H2 valve closed
12/4/2011	9:30:33 PM	BCl3 valve closed
12/4/2011	9:30:33 PM	PH3 valve closed
12/4/2011	9:30:33 PM	SiCl4 pre valve closed
12/4/2011	9:30:33 PM	SiCl4 post valve closed
12/4/2011	9:30:33 PM	Main Vac valve closed
12/4/2011	9:30:33 PM	Bypass valve closed
12/4/2011	9:30:33 PM	Helium valve opened
12/4/2011	9:30:33 PM	Bubbler valve opened
12/4/2011	9:30:33 PM	Helium MFC set to  500.000000
12/4/2011	9:30:33 PM	H2 MFC set to  0.000000
12/4/2011	9:30:33 PM	BCl3 MFC set to  0.000000
12/4/2011	9:30:33 PM	PHl3 MFC set to  0.000000
12/4/2011	9:30:33 PM	SiCl4 MFC set to  0.000000
12/4/2011	9:30:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	9:30:33 PM	Tube furnace set to 0
12/4/2011	9:50:33 PM	Helium valve closed
12/4/2011	9:50:33 PM	H2 valve closed
12/4/2011	9:50:33 PM	BCl3 valve closed
12/4/2011	9:50:33 PM	PH3 valve closed
12/4/2011	9:50:33 PM	SiCl4 pre valve closed
12/4/2011	9:50:33 PM	SiCl4 post valve closed
12/4/2011	9:50:33 PM	Main Vac valve closed
12/4/2011	9:50:33 PM	Bypass valve closed
12/4/2011	9:50:33 PM	Bubbler valve closed
12/4/2011	9:50:33 PM	Helium MFC set to  0.000000
12/4/2011	9:50:33 PM	H2 MFC set to  0.000000
12/4/2011	9:50:33 PM	BCl3 MFC set to  0.000000
12/4/2011	9:50:33 PM	PHl3 MFC set to  0.000000
12/4/2011	9:50:33 PM	SiCl4 MFC set to  0.000000
12/4/2011	9:50:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	9:50:33 PM	Tube furnace set to 0
12/4/2011	10:10:33 PM	Helium valve closed
12/4/2011	10:10:33 PM	H2 valve closed
12/4/2011	10:10:33 PM	BCl3 valve closed
12/4/2011	10:10:33 PM	PH3 valve closed
12/4/2011	10:10:33 PM	SiCl4 pre valve closed
12/4/2011	10:10:33 PM	SiCl4 post valve closed
12/4/2011	10:10:33 PM	Main Vac valve closed
12/4/2011	10:10:33 PM	Bubbler valve closed
12/4/2011	10:10:33 PM	Bypass valve opened
12/4/2011	10:10:33 PM	Helium MFC set to  0.000000
12/4/2011	10:10:33 PM	H2 MFC set to  0.000000
12/4/2011	10:10:33 PM	BCl3 MFC set to  0.000000
12/4/2011	10:10:33 PM	PHl3 MFC set to  0.000000
12/4/2011	10:10:33 PM	SiCl4 MFC set to  0.000000
12/4/2011	10:10:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	10:10:33 PM	Tube furnace set to 0
12/4/2011	10:12:48 PM	Helium valve closed
12/4/2011	10:12:48 PM	H2 valve closed
12/4/2011	10:12:48 PM	BCl3 valve closed
12/4/2011	10:12:48 PM	PH3 valve closed
12/4/2011	10:12:48 PM	SiCl4 pre valve closed
12/4/2011	10:12:48 PM	SiCl4 post valve closed
12/4/2011	10:12:48 PM	Main Vac valve closed
12/4/2011	10:12:48 PM	Bubbler valve closed
12/4/2011	10:12:48 PM	Bypass valve opened
12/4/2011	10:12:48 PM	Helium MFC set to  0.000000
12/4/2011	10:12:48 PM	H2 MFC set to  0.000000
12/4/2011	10:12:48 PM	BCl3 MFC set to  0.000000
12/4/2011	10:12:48 PM	PHl3 MFC set to  0.000000
12/4/2011	10:12:48 PM	SiCl4 MFC set to  0.000000
12/4/2011	10:12:48 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	10:12:48 PM	Tube furnace set to 0
12/4/2011	10:13:48 PM	Helium valve closed
12/4/2011	10:13:48 PM	H2 valve closed
12/4/2011	10:13:48 PM	BCl3 valve closed
12/4/2011	10:13:48 PM	PH3 valve closed
12/4/2011	10:13:48 PM	SiCl4 pre valve closed
12/4/2011	10:13:48 PM	SiCl4 post valve closed
12/4/2011	10:13:48 PM	Bypass valve closed
12/4/2011	10:13:48 PM	Bubbler valve closed
12/4/2011	10:13:48 PM	Main Vac valve opened
12/4/2011	10:13:48 PM	Helium MFC set to  0.000000
12/4/2011	10:13:48 PM	H2 MFC set to  0.000000
12/4/2011	10:13:48 PM	BCl3 MFC set to  0.000000
12/4/2011	10:13:48 PM	PHl3 MFC set to  0.000000
12/4/2011	10:13:48 PM	SiCl4 MFC set to  0.000000
12/4/2011	10:13:48 PM	Bypass solenoid MFC set to  0.000000
12/4/2011	10:13:48 PM	Tube furnace set to 0
12/4/2011	11:13:48 PM	Run finished at 11:13 PM
